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High-Performance MEMS Flow Sensor Modules
Renesas’ mass flow sensor modules are ideal for use in the industrial process, healthcare and medical, and automotive markets
Solid-state mass flow sensor modules from Renesas measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The tiny flow sensors utilize a series of MEMS thermocouples which provide excellent signal-to-noise ratio. With solid thermal isolation of the active MEMS sensing element and silicon-carbide film coating, Renesas flow sensors deliver excellent abrasive wear resistance and long-term reliability.
Renesas offers an un-calibrated millivolt output or fully calibrated and linearized version for either gas or liquid with typical accuracy down to 2% of reading.
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High-Performance MEMS Flow Sensor Modules
| Image | Manufacturer Part Number | Description | Available Quantity | Price | View Details | |
|---|---|---|---|---|---|---|
 |  | FS1012-1100-NG | SENSOR FLOW GAS 0 ~ 10 SLPM | 0 - Immediate | $2,671.32 | View Details |
| | FS1012-1002-LQ | SENSOR FLOW LIQ 0~1 SLPM | 0 - Immediate | See Page for Pricing | View Details |
|  | FS2012-1100-NG | SENSOR FLOW GAS 0 ~ 10 SLPM | 0 - Immediate | $7,097.23 | View Details |
| | FS2012-1002-LQ | SENSOR FLOW LIQ 0~1 SLPM | 0 - Immediate | See Page for Pricing | View Details |
| | FS1012-1001-LQ | SENSOR FLOW LIQ 0~0.5 SLPM | 0 - Immediate | See Page for Pricing | View Details |
| | FS1012-1020-NG | SENSOR FLOW GAS 0 ~ 2 SLPM | 0 - Immediate | $2,997.47 | View Details |
| | FS2012-1001-LQ | SENSOR FLOW LIQ 0~0.5 SLPM | 0 - Immediate | See Page for Pricing | View Details |
| | FS2012-1020-NG | SENSOR FLOW GAS 0 ~ 2 SLPM | 0 - Immediate | $8,771.60 | View Details |
|  | FS1023 | SENSOR FLOW LIQ 0~3 LPM | 0 - Immediate | See Page for Pricing | View Details |
|  | FS1025 | SENSOR FLOW LIQ 0 ~ 7 LPM | 0 - Immediate | See Page for Pricing | View Details |
|  | FS1027 | SENSOR FLOW LIQ 0~10 LPM | 179 - Immediate | $4,554.93 | View Details |
Evaluation Kits / Sensor Kits
| Image | Manufacturer Part Number | Description | Available Quantity | Price | View Details | |
|---|---|---|---|---|---|---|
|  | SDAF01 | FS2012 GAS FLOW SENSOR EVAL KIT | 0 - Immediate | $9,458.38 | View Details |
|  | SDAF02 | FS2012 LIQUIDFLOW SENSOR EVALKIT | 0 - Immediate | $8,235.31 | View Details |
|  | SDAWIR01 | WIRELESS DEMO KIT | 0 - Immediate | See Page for Pricing | View Details |
|  | SDAWIR02 | WIRELESS DEMO KIT | 1 - Immediate | $16,889.96 | View Details |
Updated: 2018-08-13
Published: 2017-09-27
India